Electrical characterization of advanced MIM capacitors with ZrO2 Insulator for high-density packaging and RF applications - FMNT - Fédération Micro- et Nano- Technologies Accéder directement au contenu
Article Dans Une Revue IEEE Transactions on Components, Packaging and Manufacturing Technology Année : 2012
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hal-00777838 , version 1 (18-01-2013)

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  • HAL Id : hal-00777838 , version 1

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T. Bertaud, C. Bermond, S. Blonkowski, Corentin Vallée, T. Lacrevaz, et al.. Electrical characterization of advanced MIM capacitors with ZrO2 Insulator for high-density packaging and RF applications. IEEE Transactions on Components, Packaging and Manufacturing Technology, 2012, pp.2 (2012) 502-509. ⟨hal-00777838⟩
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