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Communication Dans Un Congrès Année : 2009

DC to Radio-Frequency Characterization of ZrO2 Dielectric for "Metal-Insulator-Metal" Integrated Capacitors

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Dates et versions

hal-00602878 , version 1 (23-06-2011)

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  • HAL Id : hal-00602878 , version 1

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T. Bertaud, Corentin Vallée, C. Bermond, T. Lacrevaz, B. Fléchet, et al.. DC to Radio-Frequency Characterization of ZrO2 Dielectric for "Metal-Insulator-Metal" Integrated Capacitors. " DC to Radio-Frequency Characterization of ZrO2 Dielectric for "Metal-Insulator-Metal" Integrated Capacitors, Dec 2009, Singapore. ⟨hal-00602878⟩
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