Digital Control of MEMS Gyroscopes: a Robust Approach
Résumé
This work presents a new approach to design the controllers for MEMS gyroscopes based on the robust H∞ synthesis. A systematic and flexible method for designing digital controllers for the drive and sense modes of a Coriolis vibratory gyroscope is proposed. Furthermore, the sinusoidal signals are directly controlled instead of their amplitude and phase, so that (de)modulation is not required in the control loops. This fact allows us to simplify the electronic design and to provide formal guarantees of stability and performance. First practical results are presented, proving the implementability of our approach. Index Terms-Direct control, H∞ synthesis, MEMS gyroscope, digital control.
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