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Article Dans Une Revue Comptes Rendus. Chimie Année : 2018

Fluorine-based plasmas: Main features and application in micro-and nanotechnology and in surface treatment

Christophe Cardinaud
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hal-01972322 , version 1 (07-01-2019)

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  • HAL Id : hal-01972322 , version 1

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Christophe Cardinaud. Fluorine-based plasmas: Main features and application in micro-and nanotechnology and in surface treatment. Comptes Rendus. Chimie, 2018, 21 (8), pp.723-739. ⟨hal-01972322⟩
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