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Structural properties of high k Y2O3 layers prepared by Pulsed injection Plasma

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hal-00390546 , version 1 (02-06-2009)

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  • HAL Id : hal-00390546 , version 1

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Corentin Vallée, C. Durand, B. Pelissier, M. Bonvalot, C. Dubourdieu, et al.. Structural properties of high k Y2O3 layers prepared by Pulsed injection Plasma. Présentation MRS 2002 (fall meeting), 2002, Boston, United States. ⟨hal-00390546⟩
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