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https://hal.science/hal-00390546
Submitted on : Tuesday, June 2, 2009-1:45:43 PM
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- HAL Id : hal-00390546 , version 1
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Corentin Vallée, C. Durand, B. Pelissier, M. Bonvalot, C. Dubourdieu, et al.. Structural properties of high k Y2O3 layers prepared by Pulsed injection Plasma. Présentation MRS 2002 (fall meeting), 2002, Boston, United States. ⟨hal-00390546⟩
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