Full-SiC Single-Chip Buck and Boost MOSFET-JBS Converters for Ultimate Efficient Power Vertical Integration - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2023

Full-SiC Single-Chip Buck and Boost MOSFET-JBS Converters for Ultimate Efficient Power Vertical Integration

Frédéric Richardeau
Mihai Lazar
Nour Beydoun
  • Fonction : Auteur
  • PersonId : 1266722
Philippe Godignon
  • Fonction : Auteur
  • PersonId : 1266723
Hervé Morel

Résumé

This paper aims at demonstrating the relevance of a new design perimeter for power switching cells through a monolithic vertical integration approach on a multi-terminal power chip with Wide-Band Gap material such as 4H silicon carbide (SiC). Multi-terminal monolithic architectures making use quasi-only of vertical unipolar switch (VDMOS) and JBS diode architecture within the context of a 600V/10A full integration of switching cells on 4H-SiC chips are proposed and validated through Sentaurus 2D numerical simulations. The key method to etch and to fill the metallic via needed to connect the VDMOS and the JBS from top to back side of the SiC wafer is presented. The first optimization of the electroplating process resulted in a Ni metal layer of about 5µm thick.
Fichier principal
Vignette du fichier
Paper mixdes 2023 Review Godignon - HAL.pdf (907.99 Ko) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)
Licence : CC BY - Paternité

Dates et versions

hal-04147862 , version 1 (01-07-2023)

Licence

Paternité

Identifiants

Citer

Ralph Makhoul, Abdelhakim Bourennane, Luong Viêt Phung, Frédéric Richardeau, Mihai Lazar, et al.. Full-SiC Single-Chip Buck and Boost MOSFET-JBS Converters for Ultimate Efficient Power Vertical Integration. IEEE 30th International Conference Mixed Design of Integrated Circuits and Systems, Institute of Computer Science of AGH University of Science and Technology, Jun 2023, Kraków, Poland. https://www.mixdes.org/Mixdes3/, ⟨10.23919/MIXDES58562.2023.10203213⟩. ⟨hal-04147862⟩
63 Consultations
54 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More