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Journal Articles ECS Meeting Abstracts Year : 2009

Mass spectrometry as a tool study CVD process

Abstract

Mass spectrometry as a tool study CVD process. Application of two mass spectrometric (MS) techniques to study chemical vapour deposition from organometallic precursors is described. CpCuPEt3 (Cp = η5-C5H5, Et =C2H5) was used as a model precursor in this work.

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Materials
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Dates and versions

hal-03565683 , version 1 (11-02-2022)

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Asiya E. Turgambaeva, Vladislav V. Krisyuk, Nathalie Prud’homme, Constantin Vahlas. Mass spectrometry as a tool study CVD process. ECS Meeting Abstracts, 2009, 25 (8), pp.1301-1308. ⟨10.1149/1.3207736⟩. ⟨hal-03565683⟩
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