Identification-Based Approach for Electrical Coupling Compensation in a MEMS Gyroscope
Résumé
This work consists of a new approach to identify and compensate the parasitic electrical coupling between the excitation and the detection circuits of a MEMS gyroscope. Based on multivariable identification and the nonlinear behavior of electrostatic actuators, we propose a systematic and flexible way to model the mechanical modes as well as the parasitic coupling. The electrical coupling model is then used to compensate the parasitic effects of the device. Our main contributions are: (i) no model structure is enforced, so all the dynamics between actuation and detection are considered; and (ii) the multivariable framework allows also identifying the parasitic cross-couplings.
Mots clés
parasitic coupling
mechanical modes
electrical coupling model
parasitic effects
model structure
actuation
multivariable framework
parasitic cross-couplings
identification-based approach
electrical coupling compensation
parasitic electrical coupling
MEMS gyroscope
detection circuits
electrostatic actuators
multivariable identification
nonlinear behavior
Domaines
Automatique / Robotique
Origine : Fichiers produits par l'(les) auteur(s)