Communication Dans Un Congrès Année : 2014

Composition profiles in InP/InAsP quantum well structures under the effect of reactives gases during dry etching processes — Luminescence and SIMS

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hal-01132900 , version 1 (18-03-2015)

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Jean-Pierre Landesman, José Jimenez, V. Hortelano, Yoan Léger, Herve Folliot, et al.. Composition profiles in InP/InAsP quantum well structures under the effect of reactives gases during dry etching processes — Luminescence and SIMS. 26th International Conference on Indium Phosphide and Related Materials (IPRM 2014), May 2014, Montpellier, France. pp.P7, ⟨10.1109/ICIPRM.2014.6880554⟩. ⟨hal-01132900⟩
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