Femtosecond Bessel filaments for high aspect-ratio and taper-free micromachining of dielectrics
Abstract
Femtosecond Bessel beams are demonstrated for high aspect ratio machining in the filamentation regime with water assistance. Taper-free microchannels and micro-trenches are demonstrated with aspect ratio up to 40 and diameters down to 2 µm.
Domains
Optics / Photonic
Origin : Files produced by the author(s)