Femtosecond Bessel filaments for high aspect-ratio and taper-free micromachining of dielectrics
Résumé
Femtosecond Bessel beams are demonstrated for high aspect ratio machining in the filamentation regime with water assistance. Taper-free microchannels and micro-trenches are demonstrated with aspect ratio up to 40 and diameters down to 2 µm.
Domaines
Optique / photonique
Origine : Fichiers produits par l'(les) auteur(s)