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Conference Papers Year : 2010

LiNbO3 Film Bulk Acoustic Resonator


As layer transfer techniques have been notably improved these passed years, lithium niobate (LiNbO3) appears as a candidate for the next generation of ultra wide band RadioFrequency (RF) filters. Depending on the crystalline orientation, LiNbO3 can achieve electromechanical coupling factors Kt(2) more than 6 times larger than those of sputtered aluminium nitride films. In this paper, a process based on direct bonding, grinding, polishing and Deep Reactive Ion Etching (DRIE) is proposed to fabricate a single crystal LiNbO3 Film Bulk Acoustic Resonator (FBAR). From the fabricated test vehicles K-t(2) of 45% is measured confirming the values predicted by theoretical computations.


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hal-00589215 , version 1 (09-04-2021)





M. Pijolat, S. Loubriat, D. Mercier, A. Reinhardt, E. Defaÿ, et al.. LiNbO3 Film Bulk Acoustic Resonator. 2010 IEEE International Frequency Control Symposium, Jun 2010, New Port Beach, United States. pp.661-664, ⟨10.1109/FREQ.2010.5556245⟩. ⟨hal-00589215⟩
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