Article Dans Une Revue Surface and Coatings Technology Année : 2008

Relation between residual stresses and microstructure in Mo(Cr) thin films elaborated by ionized magnetron sputtering

J. Tranchant
P.O. Renault
B. Girault
P. Goudeau
  • Fonction : Auteur

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hal-00396504 , version 1 (18-06-2009)

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J. Tranchant, Pierre-Yves Tessier, J.P. Landesman, M. A. Djouadi, Benoit Angleraud, et al.. Relation between residual stresses and microstructure in Mo(Cr) thin films elaborated by ionized magnetron sputtering. Surface and Coatings Technology, 2008, 202 (11), pp.2247. ⟨10.1016/j.surfcoat.2007.07.030⟩. ⟨hal-00396504⟩
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