Mechanical cycling for electrical performances of materials used in MEMS : Application to gold micro-switches. - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue metals materials and Processes Année : 2008

Mechanical cycling for electrical performances of materials used in MEMS : Application to gold micro-switches.

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hal-00349190 , version 1 (24-12-2008)

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  • HAL Id : hal-00349190 , version 1

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C. Seguineau, A. Broue, J. Dhennin, J.M. Desmarres, Arnaud Pothier, et al.. Mechanical cycling for electrical performances of materials used in MEMS : Application to gold micro-switches.. metals materials and Processes, 2008, 20 (2), pp.1-24. ⟨hal-00349190⟩
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