Shape memory alloys (SMA) show a high ratio of work capacity per material volume. This makes the application of SMA especially useful in micron-sized systems. The development of robotic grippers is one important prerequisite for the successful automation of the assembly of micro systems. Therefore the SMA may also play a role, for example, as actuators in micron-sized grippers. This paper presents the development of micron-sized grippers. Due to a special relation between the electrical resistance and the shape change of a NiTi-wire the actuator may also be used simultaneously as a sensor. Besides these functional properties a superelastic SMA may be used for structural purposes, i.e. as solid-state flexure hinges. The sensoric features of binary and ternary NiTi-based alloys are investigated using different Ti50Ni50-xCux alloys with 0 < x < 25 at-%. Besides the chemical composition the functional properties are affected by the thermo-mechanical treatment (TMT). Different TMT of Ti50Ni50-xCux alloys and their influence on the functional properties are compared. The effect of the TMT on the amount and the stability of the shape memory effect has to be taken into account if the optimum alloy and condition for the use in grippers for micro assembly are investigated. The function and the properties of the developped gripping devices are demonstrated by prototypes.