Comparative structural study of Al2O3–SiO2 glasses and amorphous thin films - Archive ouverte HAL
Article Dans Une Revue International Journal of Applied Glass Science Année : 2024

Comparative structural study of Al2O3–SiO2 glasses and amorphous thin films

Étude structurale comparative de verres Al2O3–SiO2 et de films minces amorphes

Résumé

We compared the impact of alumina doping on the structure of Al2O3–SiO2 amorphous thin films and bulk glasses using Raman spectroscopy and x‐ray diffraction. In both thin films and bulk glasses, the addition of Al2O3 is accompanied by an increase in the mean Si–O–T angle and an evolution of the ring statistics with a decrease in the proportion of small rings. We evidenced structural differences between sputtered films and fused bulk glasses. Sputtered Al2O3–SiO2 thin films are about 6%–7% denser than their equivalent Al2O3–SiO2 bulk glasses. This difference is mainly due to a change in ring statistics with the formation of small rings within the sputtered thin films. These structural differences in atomic structural organization highlight the impact of the synthesis conditions and open the door to further investigation of the structure–functional property relationships in sputtered Al2O3–SiO2 thin films.
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Dates et versions

hal-04751451 , version 1 (24-10-2024)

Identifiants

Citer

Sirine Ben Khemis, Laurent Cormier, Ekaterina Burov, Hervé Montigaud, Benoit Baptiste, et al.. Comparative structural study of Al2O3–SiO2 glasses and amorphous thin films. International Journal of Applied Glass Science, 2024, 15 (3), pp.212-226. ⟨10.1111/ijag.16666⟩. ⟨hal-04751451⟩
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