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Ohmic contacts by phosphorus ion implantation on (111) N-type CVD diamond

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hal-04396184 , version 1 (15-01-2024)

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  • HAL Id : hal-04396184 , version 1

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Fontaine Lia, Isoird Karine, Tasselli Josiane, Austin Patrick, M.A. Pinault-Thaury, et al.. Ohmic contacts by phosphorus ion implantation on (111) N-type CVD diamond. 31st International Conference on Diamond and Carbon Materials (ICDCM 2021), Sep 2021, On line, France. ⟨hal-04396184⟩
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