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Article Dans Une Revue Journal of Applied Physics Année : 2016

Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance

Résumé

We present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B 4 C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B 4 Con -Cr interface, which we modeled with a 1-1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L 2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr. V
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Dates et versions

hal-04347399 , version 1 (15-12-2023)

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C Burcklen, R Soufli, D Dennetiere, F Polack, B Capitanio, et al.. Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance. Journal of Applied Physics, 2016, 119 (12), pp.125307. ⟨10.1063/1.4944723⟩. ⟨hal-04347399⟩
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