Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance
Résumé
We present an experimental study of the effect of layer interfaces on the x-ray reflectance in Cr/B 4 C multilayer interference coatings with layer thicknesses ranging from 0.7 nm to 5.4 nm. The multilayers were deposited by magnetron sputtering and by ion beam sputtering. Grazing incidence x-ray reflectometry, soft x-ray reflectometry, and transmission electron microscopy reveal asymmetric multilayer structures with a larger B 4 Con -Cr interface, which we modeled with a 1-1.5 nm thick interfacial layer. Reflectance measurements in the vicinity of the Cr L 2,3 absorption edge demonstrate fine structure that is not predicted by simulations using the currently tabulated refractive index (optical constants) values for Cr. V
Domaines
Optique [physics.optics]
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burcklen-2016-cr_b4c_multilayer_mirrors_study.pdf (2.57 Mo)
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