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Article Dans Une Revue Applied Physics Letters Année : 2023

One-channel time reversal focusing of ultra-high frequency acoustic waves on a MEMS

Résumé

This Letter reports on a work performed to fabricate and characterize a silicon micro-machined cavity dedicated to micro-resolution Ultra-High Frequency imaging in microfluidics and microbiological applications using one-channel time reversal. Time reversal provides the means to spatially and temporally localize elastic energy on a receiver. Here, the arrays of zinc oxide micro transducers are coupled with a 400 μm thick silicon wafer containing micromachined structures for acoustical field confinement. Characterization of the diffused acoustic field and time-reversal retro-focusing are reported. The transducers are wideband in the 0.2–2 GHz range with a central frequency of 0.9 GHz.
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Dates et versions

hal-04215309 , version 1 (25-09-2023)

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Hatem Dahmani, Nikolay Smagin, P. Campistron, J. Carlier, Malika Toubal, et al.. One-channel time reversal focusing of ultra-high frequency acoustic waves on a MEMS. Applied Physics Letters, 2023, 122 (10), pp.102201. ⟨10.1063/5.0142179⟩. ⟨hal-04215309⟩
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