A new miniature magnetometer based on a quartz MEMS Resonator and a Stack of Magnetic Materials
Résumé
This paper presents an innovative 1D MEMS resonating magnetometer exploiting the torque induced by the external magnetic field on a stack of ferromagnetic and antiferromagnetic materials. It is targeted for applications such as magneto-inertial navigation. The sensor was successfully fabricated using a wet chemical process and its working principle was proven correct. The experimental results showed a sensitivity of 1500 Hz/T and an estimated resolution of 7.3 nT.
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