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Communication dans un congrès Année : 2022

A new miniature magnetometer based on a quartz MEMS Resonator and a Stack of Magnetic Materials

Résumé

This paper presents an innovative 1D MEMS resonating magnetometer exploiting the torque induced by the external magnetic field on a stack of ferromagnetic and antiferromagnetic materials. It is targeted for applications such as magneto-inertial navigation. The sensor was successfully fabricated using a wet chemical process and its working principle was proven correct. The experimental results showed a sensitivity of 1500 Hz/T and an estimated resolution of 7.3 nT.
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Dates et versions

hal-04102763, version 1 (22-05-2023)

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Charles Mauc, Thomas Perrier, Raphael Levy, Johan Moulin. A new miniature magnetometer based on a quartz MEMS Resonator and a Stack of Magnetic Materials. IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS 2022), IEEE, Jan 2022, Tokyo, Japan. pp.955-958, ⟨10.1109/MEMS51670.2022.9699574⟩. ⟨hal-04102763⟩
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Dernière date de mise à jour le 26/06/2024
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