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Article Dans Une Revue Microelectronic Engineering Année : 2023

Influence of fluorine implantation on the physical and electrical characteristics of GaN-on-GaN vertical Schottky diode

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hal-04092722 , version 1 (09-05-2023)

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Vishwajeet Maurya, Julien Buckley, Daniel Alquier, Helge Haas, Mohamed-Reda Irekti, et al.. Influence of fluorine implantation on the physical and electrical characteristics of GaN-on-GaN vertical Schottky diode. Microelectronic Engineering, 2023, 274, pp.111975. ⟨10.1016/j.mee.2023.111975⟩. ⟨hal-04092722⟩
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