MEMS resonator parameter estimation from fast frequency sweeps - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2022

MEMS resonator parameter estimation from fast frequency sweeps

Résumé

In this paper, we introduce a new approach to the estimation of the parameters of high quality factor, low natural frequency resonators. Our approach is based on transient measurements of the slowly-varying amplitude and phase response of a resonator to an arbitrary nearly-periodic drive stimulus. We show how this approach may be employed for estimating the parameters of nonlinear resonators, with a parameter estimation procedure that does not rely on a closedform expression of the transient response, nor on an iterative algorithm (it results in a linear least squares problem), is simple to implement and is very amenable to integration. We illustrate our approach with simulations of fast frequency sweeps, highlight its benefits compared to steady-state response fitting, and study its robustness to measurement noise.
Fichier principal
Vignette du fichier
MEMS_Resonator_Parameter_Estimation_from_Fast_Frequency_Sweeps.pdf (1.07 Mo) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)

Dates et versions

hal-04059802 , version 1 (05-04-2023)

Identifiants

Citer

Jérôme Juillard, Zalfa Jouni, Laurent Bourgois, Erwan Libessart, Margot Morlans, et al.. MEMS resonator parameter estimation from fast frequency sweeps. 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS 2022), IEEE, Apr 2022, Paris, France. ⟨10.1109/EFTF/IFCS54560.2022.9850663⟩. ⟨hal-04059802⟩
38 Consultations
41 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More