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Communication Dans Un Congrès Année : 2022

High quality factor Hybrid SAW/BAW resonators

Résumé

We report hybrid SAW/BAW resonators based on arrays of AlN/Mo transducers located atop a silicon substrate. Thanks to an optimized fabrication process, these devices exhibit quality factors up to 3,900 and 1,700 respectively for the pseudo-SAW and pseudo-BAW modes, at frequencies close to 600 MHz and 2.9 GHz.
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Dates et versions

hal-03778679 , version 1 (16-11-2022)

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S. Barsoum, C. Hellion, E. Vermande, J.M. Quemper, M. Bousquet, et al.. High quality factor Hybrid SAW/BAW resonators. EFTF/IFCS 2022 - Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, Apr 2022, Paris, France. pp.1-4, ⟨10.1109/EFTF/IFCS54560.2022.9850764⟩. ⟨hal-03778679⟩
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