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Poster De Conférence Année : 2021

Calibration of micro Pirani vacuum gauges for internal pressure measurement in miniaturized vacuum chambers

Résumé

Miniaturized vacuum chambers typically have vacuum feedthroughs and fittings with a low and poorly known conductance, a rather high and variable outgassing rate, and often, non-negligible leak rates. Consequently, the internal pressure is difficult to estimate with a good accuracy from the usual external pressure measurement, notably when in situ heating/cooling is performed or when a gas is injected. To solve this issue, one or several micro Pirani gauges [1, 2] can be integrated inside the chamber for direct internal pressure measurement, at least in the 10-4 mbar to a few hundreds of mbar range. In order to calibrate such micro Pirani gauges and overall their gas dependencies, we specifically developed a vacuum setup equipped with three high accuracy (0.5%) absolute capacitance gauges, a dedicated electronic card with a 16 bits AD converter, and an acquisition/calibration software. These tools were used for the calibration at 21°C of the response in N2 (Fig.1) and the gas dependencies in a large pressure range (Fig.2) for Ar, H2 and ambient Air (Rh=40%) of HVS Vac03k and Vac04 micro Pirani sensors in TO39 package from Heiman™ company [1]. The gas dependency below ~1 mbar is close to results reported by K. Jousten [3] for macroscopic Pirani gauges but with a larger discrepancy for H2 than for Argon (Fig. 2.). At higher pressure, the responses for Ar and H2 rapidly diverge from N2 response and are also drastically different from macroscopic Pirani gauges. The Air pressure differs significantly from N2 pressure only beyond a few mbars. Future works will investigate the case of other gases and the effect of temperature.
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Dates et versions

hal-03398766 , version 1 (23-10-2021)

Identifiants

  • HAL Id : hal-03398766 , version 1

Citer

Philippe Coste, F Parrain, Alain Bosseboeuf, Clément Bessouet, Johan Moulin, et al.. Calibration of micro Pirani vacuum gauges for internal pressure measurement in miniaturized vacuum chambers. 16th European Vacuum Confernce, Nov 2021, Marseille, France. ⟨hal-03398766⟩
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