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Communication Dans Un Congrès Année : 2020

Quantification of the adhesion of metal thin film interfaces by picosecond acoustics

Résumé

Thin films are widespread in numerous fields: engineering, electronics, optics, biomedical, space and many more. They are largely used and require a flawless quality. One of the most important parameters is the adhesion of a layer with the substrate. Different methods of measuring the adhesion are used with the purpose of ensuring the good quality of the material. These methods have the great disadvantage of being destructive and no repeatable [1]. Picosecond acoustics is an ultrasonic laser method suitable for thin films [2]. It works around a femtosecond laser that generates, by a thermoelastic effect, a very high frequency acoustic wave (between 10 - 300 GHz). It propagates inside the studied sample and provides informations about the elasticity and the thickness by measuring the time of flight of each echoes detected at the surface. A variation of the wavelength of the laser allows us to gain additional information. For instance, to be aware of the quality of the interface by measuring the reflection coefficient. The size of the value of this coefficient varies according to the quality of collage. A greater reflection means a poorly collage [3]. If a correlation between reflection coefficient and adhesion energy is possible, picosecond acoustics may become a non-destructive method of energy quantification. Measurements are made on nickel films deposited on various substrates using evaporation or sputtering and various parameters to influence adhesion between the film and the substrate. Adhesion of the same series of samples is then studied using two approaches: acoustic reflection using picosecond acoustics and adhesion energy as measured with the centrifuge technology [4]. In this work we present details of such a protocol and discuss the correlation between both approaches results.
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Dates et versions

hal-03242461 , version 1 (16-06-2021)

Identifiants

Citer

Alejandro Vital Juarez, Arnaud Devos, Jean-Michel Desmarres. Quantification of the adhesion of metal thin film interfaces by picosecond acoustics. Forum Acusticum, Dec 2020, Lyon, France. pp.2833-2834, ⟨10.48465/fa.2020.0591⟩. ⟨hal-03242461⟩
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