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Proceedings/Recueil Des Communications Année : 2019

Laser grooving of multi stack material modeling: implementation of a high accuracy tool for laser-grooving and dicing application

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hal-03178736 , version 1 (24-03-2021)

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Jeff Moussodji, Oswaldo Chacon, Francis Santerre, Dominique Drouin. Laser grooving of multi stack material modeling: implementation of a high accuracy tool for laser-grooving and dicing application. Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV, Feb 2019, San Francisco, SPIE, pp.12, 2019, ⟨10.1117/12.2504649⟩. ⟨hal-03178736⟩
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