Model Predictive Control With Obstacle Avoidance for Inertia Actuated AFM Probes Inside a Scanning Electron Microscope
Résumé
The Atomic Force Microscope (AFM) is a reliable tool 6 for 3D imaging and manipulation at the micrometer and nanometer 7 scales. When used inside a Scanning Electron Microscope (SEM), 8 AFM probes can be localized and controlled with a nanometer res-9 olution by visual feedback. However, achieving trajectory control 10 and obstacles avoidance is still a major concern for manipulation 11 tasks. We propose a Model Predictive Control (MPC) to address 12 these two issues while AFM probes are actuated by Piezoelectric 13 Inertia type Actuators (PIA). The novelty of this letter is that the 14 model of our MPC-based approach relies on a velocity map of PIAs.
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