Edge mode engineering for optimal ultracoherent silicon nitride membranes
Résumé
Due to their high force sensitivity, mechanical resonators combining low mechanical dissipation with a small motional mass are highly demanded in fields as diverse as resonant force microscopy, mass sensing, or cavity optomechanics. "Soft-clamping" is a phononic engineering technique by which mechanical modes of highly-stressed membranes or strings are localized away from lossy regions, thereby enabling ultrahigh-Q for ng-scale devices. Here, we report on parasitic modes arising from the finite size of the structure which can significantly degrade the performance of these membranes. Through
Domaines
Physique Quantique [quant-ph]| Origine | Fichiers produits par l'(les) auteur(s) |
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