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Communication Dans Un Congrès Année : 2014

Control over the ion flux obtained by sawtooth-like waveforms in radiofrequency capacitively coupled plasmas

Bastien Bruneau
  • Fonction : Auteur
Trevor Lafleur
Jean-Paul Booth
Erik Johnson
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hal-02593674 , version 1 (15-05-2020)

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  • HAL Id : hal-02593674 , version 1

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Bastien Bruneau, T. Novikova, Trevor Lafleur, Jean-Paul Booth, Erik Johnson. Control over the ion flux obtained by sawtooth-like waveforms in radiofrequency capacitively coupled plasmas. AVS Annual Symposium, Nov 2014, Baltimore, Maryland, United States. ⟨hal-02593674⟩
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