Cold Chemical Lamination Tests of Grooved Internal Cavities in LTCC for Thermal Management
Résumé
This paper presents the fabrication of a micro heat pipe, in Low Temperature Cofired Ceramics (LTCC), as a cooling solution for electronic packaging. The micro heat pipe structure, produced using the ESL 41020 tape, is based on a grooved internal cavity, which ensures the process of cooling since it guarantees the evacuation of heat, by the use of working liquid. The manufacturing of the micro heat pipe with the standard LTCC fabrication process gives inflated cavities and deformed grooves. To improve this we make use of cold chemical lamination and test the cetyl alcohol as a sacrificial volume material, (SVM). The tests performed show that the cold chemical lamination did not improve the structure; neither did the cetyl alcohol with a hot lamination.
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