On the chemistry of epitaxial Ti3SiC2 formation on 4H-SiC using Al-Ti annealing
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https://hal.science/hal-02428741
Submitted on : Monday, January 6, 2020-11:17:14 AM
Last modification on : Tuesday, March 10, 2026-4:26:02 PM
Long-term archiving on : Tuesday, April 7, 2020-5:17:29 PM