Conference Papers Year : 2014

On the chemistry of epitaxial Ti3SiC2 formation on 4H-SiC using Al-Ti annealing

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hal-02428741 , version 1 (06-01-2020)

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Tony Abi Tannous, Maher Soueidan, Gabriel Ferro, Mihai Lazar, Bérangère Toury, et al.. On the chemistry of epitaxial Ti3SiC2 formation on 4H-SiC using Al-Ti annealing. ECSCRM'14, Sep 2014, Grenoble, France. pp.TU-P-63. ⟨hal-02428741⟩
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