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Communication dans un congrès Année : 2018

Modeling of a vibrating MEMS magnetometer partially covered with a ferromagnetic thin film

Résumé

This paper describes a fully analytic model of sensitivity of a vibrating magnetometer partially covered with a ferromagnetic thin film. This model is based on the Rayleigh’s energetic method and is confirmed by Finite Element Method (FEM) and experimental measurements. Thereby, it is possible to optimize the position of the ferromagnetic thin film and find the best tradeoff between the sensitivity increase and the reduction of resonator energy losses to achieve better resolution.
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Dates et versions

hal-01961024, version 1 (19-12-2018)

Identifiants

  • HAL Id : hal-01961024 , version 1

Citer

Thomas Perrier, Raphaël Levy, Patrick Kayser, Béatrice Verlhac, Johan Moulin. Modeling of a vibrating MEMS magnetometer partially covered with a ferromagnetic thin film. Inertial Sensors 2018, Mar 2018, COME, Italy. ⟨hal-01961024⟩
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