Article Dans Une Revue
2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)
Année : 2015
Magali Putero : Connectez-vous pour contacter le contributeur
https://hal.science/hal-01951293
Soumis le : mardi 11 décembre 2018-12:32:52
Dernière modification le : lundi 10 juin 2024-16:58:03
Dates et versions
Identifiants
- HAL Id : hal-01951293 , version 1
- DOI : 10.1109/IITC-MAM.2015.7325629
Citer
Dominique Mangelinck, Magali Putero, Marion Descoins, Carine Perrin-Pellegrino. Stability of GeTe-based phase change material stack under thermal stress: reaction with Ti studied by combined in-situ x-ray diffraction, sheet resistance and atom probe tomography. 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), 2015, pp.71-73. ⟨10.1109/IITC-MAM.2015.7325629⟩. ⟨hal-01951293⟩
35
Consultations
0
Téléchargements