Design of porous silicon /PECVD SiO x and SiN x :H antireflection coatings for silicon solar cells - Archive ouverte HAL Accéder directement au contenu
Pré-Publication, Document De Travail Année : 2018

Design of porous silicon /PECVD SiO x and SiN x :H antireflection coatings for silicon solar cells

L. Remache
  • Fonction : Auteur
A. Mahdjoub
  • Fonction : Auteur
E. Fourmond
J. Dupuis
  • Fonction : Auteur
M. Lemiti

Résumé

The meso-porous silicon layer (PS) is a promising material to reduce the surface reflectance of solar cells. PS layers were grown on the front surface n + emitter of n +-p mono-crystalline Si junction. Single layers PS antireflec-tion coating (ARC) achieved around 8% of effective re-flectivity in the wavelength range between 400 to 1100 nm. To improve the stability and the passivation properties, and to reduce the reflectivity of PS ARC, the design of PECVD silicon oxide (SiO x) and silicon nitride (SiN x :H) layers were investigated. Optimised SiO x and SiN x layer deposited on PS decreased the effective reflec-tivity respectively to ~3.8% and ~7% between 400 and 1000nm. Open circuit voltage (V oc) measurements were carried out on all the samples by suns-Voc method and showed an improvement of 20% of the surface pas-sivation quality brought by the nitride layer after rapid thermal anneal (RTA). Using the experimental reflectivi-ty results and taking into account the surface passivation quality of the samples, numerical simulations predict an enhancement of the photogenerated current exceeding 49% for the PS/SiO x stacks.
Fichier principal
Vignette du fichier
articlepss revision4.EF.pdf (343.38 Ko) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)
Loading...

Dates et versions

hal-01706858 , version 1 (14-02-2018)

Identifiants

Citer

L. Remache, A. Mahdjoub, E. Fourmond, J. Dupuis, M. Lemiti. Design of porous silicon /PECVD SiO x and SiN x :H antireflection coatings for silicon solar cells. 2018. ⟨hal-01706858⟩
63 Consultations
149 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More