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Communication Dans Un Congrès Année : 2001

Simulation and design of a resonant polysilicon microbridge

Gabriel Vasile
Cristian Lepadatu
  • Fonction : Auteur
Carmen Moldovan
  • Fonction : Auteur
Oana Nedelcu
  • Fonction : Auteur

Résumé

Chemical or mechanical microsensors based on resonant microstructures can be produced in microsystems silicon technology. Detection is related to a shift of the resonant frequency of a microbridge by means of a laser beam. The use of conductive polysilicon is appropriate for fabrication of the structure. This paper develops a reliable electromechanical model for design of the device and its technological process. By MemCAD and MathCAD software the dynamic behaviour is numerically simulated. Random deviations for physical and technological parameters were also simulated by the Monte Carlo method.
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Dates et versions

hal-01486553 , version 1 (10-03-2017)

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Gabriel Vasile, Cristian Lepadatu, Carmen Moldovan, Oana Nedelcu. Simulation and design of a resonant polysilicon microbridge. IEEE International Semiconductor Conference, 2001, Sinaia, Romania. pp.573-576, ⟨10.1109/SMICND.2001.967532⟩. ⟨hal-01486553⟩
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