Simulation and design of a resonant polysilicon microbridge
Résumé
Chemical or mechanical microsensors based on resonant microstructures can be produced in microsystems silicon technology. Detection is related to a shift of the resonant frequency of a microbridge by means of a laser beam. The use of conductive polysilicon is appropriate for fabrication of the structure. This paper develops a reliable electromechanical model for design of the device and its technological process. By MemCAD and MathCAD software the dynamic behaviour is numerically simulated. Random deviations for physical and technological parameters were also simulated by the Monte Carlo method.