Optical diagnostics of dusty plasmas during nanoparticle growth
Résumé
Carbon-based thin films deposited on surfaces exposed to a typical capacitively-coupled RF plasma are sources of molecular precursors at the origin of nanoparticle growth. This growth leads to drastic changes of the plasma characteristics. Thus, a precise understanding of the dusty plasma structure and dynamics is required to control the plasma evolution and the nanoparticle growth. Optical diagnostics can reveal some particular features occurring in these kinds of plasmas. High-speed imaging of the plasma glow shows that instabilities induced by nanoparticle growth can be constituted of small brighter plasma regions (plasmoids) that rotate around the electrodes. A single bigger region of enhanced emission is also of particular interest: the void, a main central dust-free region, has very distinct plasma properties than the surrounding dusty region. This particularity is emphasized using optical emission spectroscopy with spatiotemporal resolution. Emission profiles are obtained for the buffer gas and the carbonaceous molecules giving insights on the changes of the electron energy distribution function during dust particle growth. Dense clouds of nanoparticles are shown to be easily formed from two different thin films, one constituted of polymer and the other one created by the plasma decomposition of ethanol.
Origine | Fichiers produits par l'(les) auteur(s) |
---|---|
Commentaire | Copyright IOP This article can be found on the publisher website : http://dx.doi.org/10.1088/0741-3335/59/1/014034 |
Loading...