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Article Dans Une Revue Plasma Processes and Polymers Année : 2017

Molecular dynamics simulations for plasma-surface interactions

Résumé

Plasma-surface interactions are in general highly complex due to the interplay of many concurrent processes. Molecular dynamics simulations provide insight in some of these processes, subject to the accessible time and length scales, and the availability of suitable force fields. In this introductory tutorial-style review, we aim to describe the current capabilities and limitations of molecular dynamics simulations in this field, restricting ourselves to low-temperature non-thermal plasmas. Attention is paid to the simulation of the various fundamental processes occurring, including sputtering, etching, implantation and deposition, as well as to what extent the basic plasma components can be accounted for, including, electric, ions, photons. A number of examples is provided, giving an bird's eye overview of the current state of the field.

Domaines

Plasmas Matériaux
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Dates et versions

hal-01358069 , version 1 (30-08-2016)

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Erik Neyts, Pascal Brault. Molecular dynamics simulations for plasma-surface interactions. Plasma Processes and Polymers, 2017, 14, pp.1600145. ⟨10.1002/ppap.201600145⟩. ⟨hal-01358069⟩
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