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Communication Dans Un Congrès Année : 2014

Actuated MOEMS Micro-Mirror based on PMN-PT Piezoelectric Material.

Résumé

This paper investigates the use of a PMN-PT [001] piezoelectric actuator to be integrated in smart Micro-Opto-Electrical-Mechanicals Systems (MOEMS). Unlike most piezoelectric materials, PMN-PT [001] can generate large-stroke out-of-plane displacement. This is due to its very high longitudinal piezoelectric coefficient of tu to 4500 pm/V. After an introduction on MOEMS actuation and a short description of the Reconfigurable Free Space Micro-Optical Bench (RFS-MoB) in which the studied actuator may be included is presented, a bulk actuator is proposed. FEM simulations are then presented highlighting some tradeoffs : increased displacement with the reduction in size while decreasing the optical aberration. It was observed that for actuators with a smaller surface than 800 x 800 µm2 and 200 µm thick, displacement larger than 325 nm is largely achievable and that the size of the usable area of the actuator varies in size with the applied voltage.
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Dates et versions

hal-01313478 , version 1 (12-05-2016)

Identifiants

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Adrian Ciubotariu, Cédric Clevy, Philippe Lutz, Ioan Alexandru Ivan. Actuated MOEMS Micro-Mirror based on PMN-PT Piezoelectric Material.. International Symposium on Optomechatronic Technologies (ISOT 2014), Nov 2014, Seattle, WA, United States. pp.182-186, ⟨10.1109/ISOT.2014.51⟩. ⟨hal-01313478⟩
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