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Communication Dans Un Congrès Année : 2014

Asymmetrical mechanical design for bouncing suppression in RF-MEMS switches

Emilien Lemoine
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  • PersonId : 930557
Cyril Guines
  • Fonction : Auteur
  • PersonId : 919493
Arnaud Pothier
Pierre Blondy
  • Fonction : Auteur
  • PersonId : 915831

Résumé

Contact bouncing is among the most critical phenomenon reducing RF-MEMS reliability. This paper shows that very simple changes in switch design permit suppression of contact bouncing upon closure. The proposed asymmetrical design gets two dimples in contact with substrate electrodes successively, instead of simultaneously. This helps the dissipation of kinetic energy and prevents contact re-opening. On top of preliminary ageing prevention, the structure can handle more actuation voltage and then have more contact force compared to symmetrical structures. Experimental demonstration is presented on metal contact switches with more than 2mN contact force, one symmetrical with significant bouncing and the other asymmetrical without any bouncing clearly show the relevance of the approach.

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Dates et versions

hal-01290699 , version 1 (18-03-2016)

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Citer

Emilien Lemoine, Cyril Guines, Arnaud Pothier, Pierre Blondy. Asymmetrical mechanical design for bouncing suppression in RF-MEMS switches . Microwave Conference (EuMC), 2014 44th European , Oct 2014, Rome, Italy. pp.1600 - 1603 ⟨10.1109/EuMC.2014.6986758⟩. ⟨hal-01290699⟩

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