Ammonia sensors based on suspended silicon nanowires
Résumé
Resistors based on parallel suspended polycrystalline silicon nanowires are fabricated using the classical top down CMOS silicon technologies. Results show potential use as sensitive units of silicon nanowires for charged chemical species (ammonia) detection. Resistors are promising as low-cost manufacturing gas sensors, for very high sensitive ammonia detection over a large concentration range.
Origine : Fichiers produits par l'(les) auteur(s)
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