Micromechanical high-doses radiation sensor with bossed membrane and interferometry optical read-out
Résumé
The silicon-glass MEMS high-doses radiation sensor with in situ detection, so far not possible in the field of detection of doses above 10 kGy, has been presented. The sensor consists of a chamber filled with the high density polyethylene (HDPE) and a silicon bossed membrane. The radiolysis product of HDPE increases the pressure inside the chamber causing the deflection of the membrane, which is proportional to the pressure, thus to radiation dose. The sensor has been irradiated with high energy electron beam and shows good detectability for 10-40 kGy. The deflection of the membrane has been detected by optical interferometer.
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