Real time control of the growth of silicon alloy multilayers by multiwavelength ellipsometry - Archive ouverte HAL Access content directly
Journal Articles Thin Solid Films Year : 1996
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hal-00915386 , version 1 (07-12-2013)

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  • HAL Id : hal-00915386 , version 1

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M. Kildemo, S. Deniau, Pavel Bulkin, Bernard Drévillon. Real time control of the growth of silicon alloy multilayers by multiwavelength ellipsometry. Thin Solid Films, 1996, pp.46-50. ⟨hal-00915386⟩
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