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Journal Articles Journal of Sensors Year : 2009

Silicon-Micromachined Gas Chromatographic Columns for the Development of Portable Detection Device

Abstract

We report the fabrication of a gas chromatographic column module integrated on a silicon substrate and usable as a portable measurement device dedicated to the selective detection of various chemical compounds (gas or vapour). PDMS, PEG, and F13- TEOS stationary phases have been prepared in order to coat the inside walls of microchannels. The microcolumn tests were performed with a mixture of hydrocarbons and ketone. After having evaluated the effectiveness of such a separation module, we showed an application by coupling a GC microcolumn with a metal oxide-based gas sensor. The best results were obtained at a low isothermal temperature mode of the GC micro-column (near the ambient temperature). The coupling between the GC microcolumn and ametal oxide gas sensor enables to obtain a rapid, reliable, and selective analysis of various chemical compounds.

Dates and versions

hal-00662258 , version 1 (23-01-2012)

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Jean-Baptiste Sanchez, Aline Schmitt, Franck Berger, Christophe Mavon. Silicon-Micromachined Gas Chromatographic Columns for the Development of Portable Detection Device. Journal of Sensors, 2009, 2010 (Article ID 409687), pp.1-8. ⟨10.1155/2010/409687⟩. ⟨hal-00662258⟩
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