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Article Dans Une Revue The Film Layers Année : 2008

Influence of the polymeric porogen on porosity and on mechanical properties of spin coated Ultra Low K dielectrics

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hal-00354264 , version 1 (19-01-2009)

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  • HAL Id : hal-00354264 , version 1

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V. Jousseaume, G. Rolland, D. Babonneau, J.P Simon. Influence of the polymeric porogen on porosity and on mechanical properties of spin coated Ultra Low K dielectrics. The Film Layers, 2008, in press. ⟨hal-00354264⟩

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