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Communication Dans Un Congrès Chemical Engineering Science Année : 2007

Ultra low K dielectrics for microelectronics studied by GISAXS

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hal-00141554 , version 1 (13-04-2007)

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  • HAL Id : hal-00141554 , version 1

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J.P. Simon. Ultra low K dielectrics for microelectronics studied by GISAXS. BCA Workshop, 2007, Grenoble, France. pp.1636-1649. ⟨hal-00141554⟩

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