Ultra low K dielectrics for microelectronics studied by GISAXS - Archive ouverte HAL
Communication Dans Un Congrès Chemical Engineering Science Année : 2007

Ultra low K dielectrics for microelectronics studied by GISAXS

Fichier non déposé

Dates et versions

hal-00141554 , version 1 (13-04-2007)

Identifiants

  • HAL Id : hal-00141554 , version 1

Citer

J.P. Simon. Ultra low K dielectrics for microelectronics studied by GISAXS. BCA Workshop, 2007, Grenoble, France. pp.1636-1649. ⟨hal-00141554⟩

Collections

UGA CNRS SIMAP
41 Consultations
0 Téléchargements

Partager

More