Theoretical calculation of composition, atomic and molecular spectral lines in Ar-SF6 plasma out of thermal equilibrium - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Journal of Physics D: Applied Physics Année : 1999

Theoretical calculation of composition, atomic and molecular spectral lines in Ar-SF6 plasma out of thermal equilibrium

Résumé

In this paper we calculate the intensity emitted by different atomic lines and by the (B 3Sigmau--X 3Sigmag-) system of S2. We show the influence on intensity of the deviation from thermal equilibrium and of the hypotheses on different temperatures (atomic excitation temperature Texat, rotational temperature Trot, vibrational temperature Tvib, diatomic excitation temperature Texmol, translation temperature of free electrons Te-tr and translation temperature of heavy species Thtr). From this method, we show that from optical emission of atomic line and diatomic molecule spectra, the deviation from thermal equilibrium and consequently the composition of plasma can be determined.

Dates et versions

hal-00018906 , version 1 (13-02-2006)

Identifiants

Citer

Géraldine Faure, Pascal André, A. Lefort. Theoretical calculation of composition, atomic and molecular spectral lines in Ar-SF6 plasma out of thermal equilibrium. Journal of Physics D: Applied Physics, 1999, 32, pp.2376-2386. ⟨10.1088/0022-3727/32/18/309⟩. ⟨hal-00018906⟩
48 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More